JPH02129660U - - Google Patents
Info
- Publication number
- JPH02129660U JPH02129660U JP3811089U JP3811089U JPH02129660U JP H02129660 U JPH02129660 U JP H02129660U JP 3811089 U JP3811089 U JP 3811089U JP 3811089 U JP3811089 U JP 3811089U JP H02129660 U JPH02129660 U JP H02129660U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- ion implantation
- semiconductor wafer
- separator
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 9
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 5
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3811089U JPH02129660U (en]) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3811089U JPH02129660U (en]) | 1989-03-31 | 1989-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02129660U true JPH02129660U (en]) | 1990-10-25 |
Family
ID=31545825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3811089U Pending JPH02129660U (en]) | 1989-03-31 | 1989-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02129660U (en]) |
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1989
- 1989-03-31 JP JP3811089U patent/JPH02129660U/ja active Pending